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Anglický jazyk
Rapid Thermal Processing of Semiconductors
Autor: Peter J. Hesketh
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field,... Viac o knihe
Na objednávku
217.79 €
bežná cena: 241.99 €
O knihe
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
- Vydavateľstvo: Springer US
- Rok vydania: 2013
- Formát: Paperback
- Rozmer: 235 x 155 mm
- Jazyk: Anglický jazyk
- ISBN: 9781489918062
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