• Anglický jazyk

Silicon Anodization as a Structuring Technique

Autor: Alexey Ivanov

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains... Viac o knihe

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O knihe

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ¿

  • Vydavateľstvo: Springer Fachmedien Wiesbaden
  • Rok vydania: 2017
  • Formát: Paperback
  • Rozmer: 210 x 148 mm
  • Jazyk: Anglický jazyk
  • ISBN: 9783658192372

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