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Anglický jazyk
Handbook of Silicon Semiconductor Metrology
Autor: Alain C. Diebold
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture... Viac o knihe
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O knihe
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.
- Vydavateľstvo: CRC Press
- Rok vydania: 2001
- Formát: Hardback
- Rozmer: 260 x 183 mm
- Jazyk: Anglický jazyk
- ISBN: 9780824705060
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