• Anglický jazyk

Introduction to Focused Ion Beam Nanometrology

Autor: David C. Cox

This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.

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O knihe

This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.

  • Vydavateľstvo: Morgan & Claypool Publishers
  • Rok vydania: 2015
  • Formát: Paperback
  • Rozmer: 254 x 178 mm
  • Jazyk: Anglický jazyk
  • ISBN: 9781681740201

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